Low-priced bellows pump for low-cost air cylinder operation. Media: Photoresist, purified water, chemicals (Combustible matter not allowed.)

Bellows pump that uses an easy-to-control stepping motor. Media: Photoresist, purified water, chemicals (Combustible matter not allowed.)

Structures that combine unique 8-shaped cross sectioned tube with bellows. No moving parts, so there is virtually no particle generation due to pump operation.

Structures that combine unique 8-shaped cross sectioned tube with bellows. No moving parts, so there is virtually no particle generation due to pump operation.

Next-generation electrical pumps and constant volume discharge pumps meet the needs of semiconductor wafers for miniaturization. Development of the world's first(Note) CT pump structure enables low dust, better foam release, and simple structure for higher precision.